Yifeng SUN, Zhishan GAO, Xiaoxin FAN, Jiale ZHANG, Jianqiu MA, Qun YUAN. Signal Processing for Height Measurement of High-aspect-ratio Structure Based on Low-coherence Interferometry[J]. Acta Photonica Sinica, 2022, 51(9): 0912001
- Acta Photonica Sinica
- Vol. 51, Issue 9, 0912001 (2022)
Fig. 1. System of Linnik-type low-coherence scanning interferometry
Fig. 2. Structural parameters of the measurement sample and the location of the sampling point
Fig. 3. Original coherence signals of eight sampling points in Fig. 2
Fig. 4. Results of CEEMDAN
Fig. 5. Pre-processed coherence signals of eight sampling points in Fig. 2 （The dotted line is the signal envelope）
Fig. 6. Flow of the proposed algorithm
Fig. 7. Binarization result combining contrast and intensity information
Fig. 8. Measurement result of the high-aspect-ratio trench
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Table 1. Measurement result of the high-aspect-ratio trench
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