• Semiconductor Optoelectronics
  • Vol. 41, Issue 3, 395 (2020)
LI Qi1,2, QI Yuejing1,2,*, LU Zengxiong1,2, ZHANG Qingyang1..., MA Jing1, YANG Guanghua1,2 and SU Jiani1|Show fewer author(s)
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  • 1[in Chinese]
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    DOI: 10.16818/j.issn1001-5868.2020.03.018 Cite this Article
    LI Qi, QI Yuejing, LU Zengxiong, ZHANG Qingyang, MA Jing, YANG Guanghua, SU Jiani. Design of Homogenizing Optical System for Testing CMOS Image Sensor in Deep Ultraviolet Region[J]. Semiconductor Optoelectronics, 2020, 41(3): 395 Copy Citation Text show less
    References

    [1] Kerkhof M A V D, Boeij W D, Kok H, et al. Full optical column characterization of DUV lithographic projection tools[J]. Proc. of SPIE, 2004, 5377: 1960-1970.

    [5] European Machine Vision Association. Standard for characterization of image sensors and cameras[S]. Germany: EMVA Standard 1288, 2010.

    [13] Dickey F M, Lizotte T E. Laser Beam Shaping Applications[M]. 2nd Edi., UK: CRC Press, 2016.

    [14] Focus Software Zemax. Optical Design Program User’s Guide[M]. USA: Focus Software Incorporated, 2001: 257.

    LI Qi, QI Yuejing, LU Zengxiong, ZHANG Qingyang, MA Jing, YANG Guanghua, SU Jiani. Design of Homogenizing Optical System for Testing CMOS Image Sensor in Deep Ultraviolet Region[J]. Semiconductor Optoelectronics, 2020, 41(3): 395
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