• Chinese Journal of Lasers
  • Vol. 37, Issue 2, 374 (2010)
Liang Xu*, You Libing, Wang Tao, and Yu Yinshan
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  • [in Chinese]
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    DOI: 10.3788/cjl20103702.0374 Cite this Article Set citation alerts
    Liang Xu, You Libing, Wang Tao, Yu Yinshan. Excimer Pulse Energy Stabilization Realized by Charging[J]. Chinese Journal of Lasers, 2010, 37(2): 374 Copy Citation Text show less

    Abstract

    A closed-loop feedback system for excimer laser pulse energy stabilization was introduced,which included a pulse energy detecting part,a switching mode power supply and a controller. Each part of the system was well shielded and the signals between the parts were transmitted by fibers. With average algorithm of pulse-pulse discharge voltage,the reliable close-loop control can be realized under the condition of strong electromagnetic interference. Tested on a 5 Hz spark discharged KrF laser,the system effectively reduced the laser pulse energy fluctuations standard deviation from 4.71% to 3.01% with a gas fill in a sound situation and from 7.18% to 3.62% with the gas in a poor situation and low discharge voltage. The method can effectively improve the stability of pulse energy.
    Liang Xu, You Libing, Wang Tao, Yu Yinshan. Excimer Pulse Energy Stabilization Realized by Charging[J]. Chinese Journal of Lasers, 2010, 37(2): 374
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