Measuring Nanoscale Motions of Microdevices Using a Mirau Interferometer

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[1] Burdess J S, Harris A J,Wood D, et al. A system for dynamic characterization of microstructures. J Microelectroech Syst , 1997,6(4): 322～328

[2] Burns D J, Helbig H F. A system for automatic electrical and optical characterization of microelectromechanical devices. J Microelectromech Syst, 1999,8(4) : 473～482

[5] Hart M R, Conant R A, Lau K Y, et al. Stroboscopic interferometer system for dynamic MEMS characterization. J Microelectromech Syst, 2000,9 (4):409～418

[6] Krehl P, Engemann S, Rembe C, et al. High-speed visualization, a powerful diagnostic tool for microactuators - retrospect and prospect. Microsystem Technologies, 1999,5(3): 113～132

[7] Rembe C,Muller R S. Measurement system for full three dimensional motion characterization of MEMS. J Microelectromech Syst, 2002,11 (5): 479 ～ 488

[8] Tang W C, Nguyen C H,Judy M W,et al. Eletrostaticcomb drive for lateral polysilicon resonators. Sensors & Actuators A,1990,21(2): 328～331

[9] Davis C Q, Freeman D M. Using a light microscope to measure motions with nanometer accuracy. Opt Eng,1998,37(4): 1299～1304

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