In this paper, a high voltage and high frequency pulse generator based on metal oxide semiconductor field effect transistor (MOSFET) switch is designed. Several series MOSFETs triggered by optical fiber signal isolation are used as high voltage switches, and the control signal is provided by the FPGA. The generator is composed of the same MOSFET tube, triggered in parallel and in sequence, synchronized with the reference signal. The circuit and working mode overcome the power consumption limitation of the MOSFET tube generator and significantly improve the pulse repetition rate. This paper introduces the working principle and fabrication process of the MHz high voltage pulse generator in detail. The preliminary test was carried out to verify the performance of the generator. Under the high repetition rate of 1 MHz, the output flat-top pulse had the rise time more than 10 ns, the pulse width 100 ns, and the voltage amplitude greater than 1 kV.