Reivew of silicon photonic switches

Xin Tu; Zhen-Min Chen; Hong-Yan Fu

doi:10.7498/aps.68.20190011

Journals >Acta Physica Sinica >Volume 68 >Issue 10 >Page 104210-1 > Article

Acta Physica Sinica
Vol. 68, Issue 10, 104210-1 (2019)

Reivew of silicon photonic switches

Xin Tu, Zhen-Min Chen, and Hong-Yan Fu^*

DOI: 10.7498/aps.68.20190011 Cite this Article

Xin Tu, Zhen-Min Chen, Hong-Yan Fu. Reivew of silicon photonic switches[J]. Acta Physica Sinica, 2019, 68(10): 104210-1 Copy Citation Text

show less

(a) Schematic of 2 × 2 MZI switch cell. Cross-sections of waveguide phase shifters: (b) Thermo-optic phase shifter using a metal heater; (c) thermo-optic phase shifter using a doped resistive heater; (d) suspended thermo-optic phase shifter using a metal heater (e) carrier injection phase shifter(a) MZI型2 × 2光开关单元结构示意图. 硅基波导开关相移器的横截面图(b) 金属薄膜热电极热光相移器; (c)掺杂波导热光相移器; (d) 空气隔离层的热光相移器; (e) 注入载流子型电光相移器

Fig. 1. (a) Schematic of 2 × 2 MZI switch cell. Cross-sections of waveguide phase shifters: (b) Thermo-optic phase shifter using a metal heater; (c) thermo-optic phase shifter using a doped resistive heater; (d) suspended thermo-optic phase shifter using a metal heater (e) carrier injection phase shifter(a) MZI型2 × 2光开关单元结构示意图. 硅基波导开关相移器的横截面图(b) 金属薄膜热电极热光相移器; (c)掺杂波导热光相移器; (d) 空气隔离层的热光相移器; (e) 注入载流子型电光相移器

Download full size | View in the Article

Fig. 2. (a) Schematic of a MRR switch cell; (b) switching paths(a) MZI型光开关单元结构图示意图; (b) 波长开关路径

Download full size | View in the Article

Fig. 3. (a) Topology of 16 × 16 Hybrid Dilated Benes^[67]; (b) wavelength constrained routing rules of the switch cell (a) Hybrid Dilated Benes架构的拓扑结构^[67]; (b)开关单元的波长受限路由规则

Download full size | View in the Article

Fig. 4. Switch matrix of different topologies (a) total number of switch cells and (b) total number of matrix stages几种不同拓扑架构的开关矩阵的(a)总开关单元数和(b)开关级数

Download full size | View in the Article

Fig. 5. Passive components: (a) In-plane waveguide crossing^[72]; (b) 3D waveguide crossing^[73]; (c) transition waveguide^[74]; (d) bend waveguide^[75]无源器件　(a)平面交叉波导^[72]; (b)立体交叉波导^[73]; (c)转接波导^[74]; (d)弯曲波导^[75]

Download full size | View in the Article

参考文献	年份	研究机构	相移器类型	相移器长/μm	开关时间	功耗/mW	损耗/dB	串扰/dB
[18]	2015	IBM	电光PIN	250	4 ns	1	1	–23
[19]	2013	CAS	电光PIN	400	–	–	–	–31
[20]	2011	IME	热光TiN	1000	144 μs	0.49	0.3	–23
[21]	2010	Kotura	电光PIN	4000	6 ns	0.6	3.2	–16
[22]	2015	UBC	热光TiN	4270	780 μs	0.05	3.3	–26
[23]	2013	MIT	热光掺杂硅	～10	2.4 μs	12.7	0.5	–20
[24]	2016	ZJU	热光TiN	20	–	–	–	–20
[25]	2014	AIST	热光TiN	～150	10 μs	30	0.5	–50
[26]	2016	IBM	电光PIN	250	4 ns	–	2	–34.5
[27]	2016	Huawei	热光TiN	250	1340/70 μs	0.5/10	0.5	–22

Table 1.

Comparison table of MZI optical waveguide switch cells

业界MZI型硅基波导光开关的代表成果

参考文献	年份	研究机构	损耗/dB	串扰/dB	功耗/mW	开关时间	带宽/nm
[30]	2011	Columbia U	——	–12	——	2.78 ns	0.56
[31]	2009	HKUST	1.64	–11	～0.1	1.3 ns	0.45
[32]	2012	IME	4.3	–10	37	1 ns	0.8
[33]	2014	TU/e	2	–20	120	17 μs	0.8
[34]	2009	Cornell U	2	–9.8	17.4	7 ns	0.48
[35]	2014	SJTU	3.4	–20	0.69(电光) 2.3(热光)	414 ps	0.48

Table 2.

Comparison table of MRR optical waveguide switch cells

业界MRR型开关的代表成果

研究机构	UC Berkeley^[45]	Tohoku U^[46]	Tohoku U^[47]	Aeponyx Inc^[48]
驱动电压/V	42	26	28.2	118
开关时间/μs	0.91	18	——	300
插入损耗/dB	0.47	1	2.6	14.8
带宽/nm	300	——	0.5	宽带
串扰/dB	–60	–17	–32.9	–40

Table 3.

Comparison table of MEMS optical waveguide switch cells

业界MEMS驱动波导型开关的代表成果

开关种类	MZI型		MRR型		MEM驱动波导型
开关种类	电光	热光	电光	热光	垂直耦合	平面耦合	端面耦合
保持开状态的功耗/mW	0.6–1	0.05–30	0.7–37	17.4–120	0	0	0
文献	[18, 21, 26]	[22, 23, 25, 27]	[32, 35]	[33, 34]	[45]	[46, 47]	[48]

Table 4. Comparison table of the power consumption of the switch engines at ON state

Xin Tu, Zhen-Min Chen, Hong-Yan Fu. Reivew of silicon photonic switches[J]. Acta Physica Sinica, 2019, 68(10): 104210-1

Download Citation

Tools

Save the article for my favorites

Paper Information