Fig. 1. Schematic of cylindrical hollow cathode discharge.圆筒形空心阴极放电单元截面图
Fig. 2. Distribution of electric potential.电势分布图
Fig. 3. Distribution of charged particle density: (a) Electron; (b) Ar+.
带电粒子密度分布图 (a) 电子; (b) Ar+
Fig. 4. Distribution of excited state atoms: (a) Ar4s; (b) Ar4p; (c) Ar3d.
激发态原子密度分布图 (a) Ar4s; (b) Ar4p; (c) Ar3d
Fig. 5. Different ionization rates: (a) G1 ground state ionization; (b) G7 Penning ionization; (c) G10 Penning ionization; (d) G5 stepwise ionization不同电离速率分布图 (a) G1基态电离; (b) G7潘宁电离; (c) G10潘宁电离; (d) G5分步电离
Fig. 6. Radial distribution of different ionizations at x = 1.2 mm
不同电离速率一维径向分布图(x = 1.2 mm)
Fig. 7. Radial distribution of averaged electron energy and electron density at x = 1.2 mm.
平均电子能量和电子密度一维径向分布图(x = 1.2 mm)
Fig. 8. Production rate of Ar4s: (a) G2, direct excitation; (b) G20, radiation transition from Ar4p.
氩原子Ar4s能级生成速率 (a) G2, 直接激发; (b) G20, 氩原子Ar4p能级辐射跃迁
Fig. 9. Radial production rate of Ar4s.
生成4s能级的径向分布图
Fig. 10. The Ar4s consuming rates of different reactions: (a) G17, Ar4s + e → Ar3d + e; (b) G18, Ar4s + e → Ar4p + e.
消耗Ar4s能级的反应速率 (a) G17, Ar4s + e → Ar3d + e; (b) G18, Ar4s + e → Ar4p + e
Fig. 11. Radial distribution of the Ar4s consuming rates.
消耗Ar4s能级的反应速率一维分布图
Fig. 12. The Ar4p production rates of different reactions: (a) G3, Ar + e → Ar4p + e; (b) G21, Ar3d→ Ar4p.
激发态氩原子Ar4p生成速率 (a) G3, Ar + e → Ar4p + e; (b) G21, Ar3d→ Ar4p
Fig. 13. Radial distribution of the production rates of Ar4p.
Ar4p生成速率的径向分布图
Fig. 14. Radial distribution of the Ar4p consuming rates.
消耗Ar4p能级的反应速率一维分布图
反应
标号
| 反应方程 | | 反应
标号
| 反应方程 | G1 | Ar + e → Ar+ + 2e[12] | | G17 | Ar4s + e → Ar3d + e[16] | G2 | Ar + e → Ar4s + e[13] | | G18 | Ar4s + e → Ar4p + e[12] | G3 | Ar + e → Ar4p + e[13] | | G19 | Ar4p + e → Ar4s + e[12] | G4 | Ar + e → Ar3d + e[13] | | G20 | Ar4p → Ar4s + hν[17] | G5 | Ar4s + e → Ar+ + 2e[14] | | G21 | Ar3d → Ar4p[16] | G6 | Ar4p + e → Ar+ + 2e[14] | | G22 | Ar+ + 2e → Ar + e[14] | G7 | 2Ar4s → Ar+ + Ar + e[15] | | G23 | Ar+ + e → Ar4s[12] | G8 | 2Ar4p → Ar+ + Ar + e[16] | | G24 | Ar+ + 2e → Ar4s + e[12] | G9 | 2Ar4s → Ar2+ + e[17] | | G25 | Ar2+ + e → 2Ar[19] | G10 | Ar4s + Ar → 2Ar[18] | | G26 | Ar2+ + e → Ar+ + Ar + e[20] | G11 | Ar4s + 2Ar → 3Ar[18] | | G27 | Ar2+ + e → Ar4s + Ar[16] | G12 | 2Ar + Ar+ → Ar2+ + Arr[16] | | G28 | Ar2+ + e → 2Ar4s[21] | G13 | Ar4s + 2Ar → Ar2 + Ar[15] | | G29 | Ar2+ + e → Ar4p + Ar[16] | G14 | Ar4s + e → Ar + e[12] | | G30 | Ar2+ + e → Ar3d + Ar[16] | G15 | Ar4s → Ar +hν[12] | | G31 | Ar + e → Ar + e[22] | G16 | Ar4p +e → Ar + e[12] | | | |
|
Table 1. Discharge reactions in the model.
反应标号 | 反应方程 | 速率平均值/cm–3·s–1 | G1 | Ar + e → Ar+ + 2e
| 2.5 × 1017 | G5 | Ar4s + e → Ar+ + 2e
| 2.6 × 1016 | G6 | Ar4p + e → Ar+ + 2e
| 1.1 × 1015 | G7 | 2Ar4s→ Ar+ + Ar + e
| 3.9 × 1016 | G8 | 2Ar4p→ Ar+ + Ar + e
| 2.9 × 1012 | G10 | 2Ar4s→ Ar2+ + e
| 3.8 × 1016 |
|
Table 2. Average values of the different ionization rates in the discharge region.
不同电离反应速率的平均值
反应标号 | 反应方程 | 源项平均值/cm–3·s–1 | G2 | Ar + e → Ar4s + e
| 1.6 × 1017 | G19 | Ar4p + e → Ar4s + e
| 9.1 × 1015 | G20 | Ar4p→ Ar4s + hν | 11.8 × 1017 | G24 | Ar+ + 2e → Ar4s + e
| 55.3 | G23 | Ar + e → Ar4s | 4.4 × 1012 | G27 | Ar2+ + e → Ar4s + Ar
| 4.3 × 1015 | G28 | Ar2+ + e → 2Ar4s | 3.9 × 1014 |
|
Table 3. Average values of the different production rates of Ar4s in the discharge region.
Ar4s生成速率平均值
反应标号 | 反应方程 | 源项平均值/cm–3·s–1 | G5 | Ar4s + e → Ar+ + 2e
| 2.6 × 1016 | G7 | 2Ar4s → Ar+ +Ar + e
| 7.9 × 1016 | G9 | Ar4s + Ar → 2Ar
| 3.0 × 1015 | G10 | 2Ar4s → Ar2+ + e
| 7.6 × 1016 | G11 | Ar4s + 2Ar → 3Ar
| 4.5 × 1015 | G13 | Ar4s + 2Ar → Ar2 + Ar
| 3.5 × 1016 | G14 | Ar4s + e → Ar + e
| 1.2 × 1015 | G15 | Ar4s → Ar + hν | 1.9 × 1017 | G17 | Ar4s + e → Ar3d + e
| 1.2 × 1017 | G18 | Ar4s + e → Ar4p + e
| 8.2 × 1017 |
|
Table 4. Average values of the different consuming rates of Ar4s in the discharge region.
消耗Ar4s的不同反应速率的平均值
反应标号 | 反应方程 | 源项平均值/cm–3·s–1 | G3 | Ar + e → Ar4p + e
| 2.2 × 1017 | G18 | Ar4s + e → Ar4p + e
| 8.2 × 1017 | G21 | Ar3d → Ar4p | 1.4 × 1017 | G29 | Ar2+ + e → Ar4p + Ar
| 4.3 × 1014 |
|
Table 5. Average values of the different production rates of Ar4p in the discharge region.
Ar4p生成速率平均值
反应标号 | 反应方程 | 源项平均值/cm–3·s–1 | G6 | Ar4p + e→Ar+ + 2e
| 1.1 × 1015 | G8 | 2Ar4p→Ar+ + Ar + e
| 5.8 × 1012 | G16 | Ar4p +e→Ar + e
| 1.3 × 1013 | G19 | Ar4p + e→Ar4s + e
| 9.1 × 1015 | G20 | Ar4p→Ar4s + hν | 11.8 × 1017 |
|
Table 6. Average values of the different consuming rates of Ar4p in the discharge region
消耗Ar4p的不同反应速率的平均值