• Semiconductor Optoelectronics
  • Vol. 42, Issue 6, 803 (2021)
PAN Wu, XIAO Huiyun, MA Yong, LIU Bowen, and YANG Longliang
Author Affiliations
  • [in Chinese]
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    DOI: 10.16818/j.issn1001-5868.2021071602 Cite this Article
    PAN Wu, XIAO Huiyun, MA Yong, LIU Bowen, YANG Longliang. Design of Terahertz Metamaterial Sensor Based on Double Opening Square Ring[J]. Semiconductor Optoelectronics, 2021, 42(6): 803 Copy Citation Text show less

    Abstract

    A terahertz metamaterial sensor based on double opening ring is proposed, which can be used to detect the refractive index and thickness of materials. The structure of the sensor consists of two parts: a metamaterial structure with two open square rings and a ring nested inside, and a polyimide substrate. When the terahertz wave is perpendicular to the surface of the metamaterial, three high-Q resonance peaks are formed in the range of 0.8~1.8THz. By discussing the relationship between the surface current distribution and the formation of three resonance peaks, it is observed that the different response characteristics of the metamaterial structure to the incident terahertz wave lead to different surface current distribution. In addition, the applications of the sensor in refractive index sensing and thickness sensing are also explored. The sensing sensitivities of 170, 103 and 119GHz/RIU can be realized for the resonant frequencies f1, f2 and f3, respectively, at a given thickness, all of which have superior sensing characteristics and can be used for high-sensitivity refractive index sensing with their multiple resonant peaks. This highly sensitive refractive index sensor can detect small changes in the analyte to be measured and has promising applications in the field of biochemical detection.