[1] L. L. Alt, S. W. Ing, Jr., and K. W. Laendle, J. Electrochem. Soc. 110, 465 (1963).
[2] S. W. Ing, Jr., and W. Davern, J. Electrochem. Soc. 111, 120 (1964).
[3] S. W. Ing, Jr., and W. Davern, J. Electrochem. Soc. 112, 284 (1965).
[4] A. R. Reinbergh, Electrochem. Soc. Ext. Abstr. 6, 19 (1974).
[5] D. E. Carlson, C. W. Magee, and A. R. Triano, J. Electrochem. Soc. Solid-State Sci. Technol. 126, 688 (1979).
[6] W. C. O’Mara, Liquid Crystal Flat Panel Displays: Manufacturing Science and Technology (Van Nostrand Reinhold, New York, 1993).
[7] S. Sherman, S. Wagner, J. Mucha, and R. A. Gottscho, J. Electrochem. Soc. 144, 3198 (1997).
[8] E. Cianci, A. Schina, A. Minotti, S. Quaresima, and V. Foglietti, Sensor. Actuator. Phys. 127, 80 (2006).
[9] D. R. Gibson, E. M. Waddell, A. D. Wilson, and K. Lewis, Opt. Eng. 33, 957 (1994).
[10] D. R. Gibson, E. M. Waddell, and K. Lewis, Proc. SPIE 2286, 335 (1994).
[11] A. Grill, Cold Plasma in Materials Fabrication (IEEE Press, New York, 1993).
[12] A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Material Processing (Wiley, New York, 1994).
[13] A. von Keudell, Plasma Sourc. Sci. Technol. 9, 455 (2000).
[14] J. R. Roth, Industrial Plasma Engineering Volume 2: Application to Nonthermal Plasma Processing (CRC Press, Boca Raton, 2001).
