• Chinese Optics Letters
  • Vol. 11, Issue s1, S10701 (2013)
Songwen Deng, Feng Wang, Shunfu Liu, Gang Li, Long Sun, and Yuqi Jin
DOI: 10.3788/col201311.s10701 Cite this Article Set citation alerts
Songwen Deng, Feng Wang, Shunfu Liu, Gang Li, Long Sun, Yuqi Jin. Residual stress prediction and control of Ta2O5/SiO2 multilayer based on layer structure designing[J]. Chinese Optics Letters, 2013, 11(s1): S10701 Copy Citation Text show less
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Data from CrossRef

[1] Qipeng Lv, Mingliang Huang, Songwen Deng, Shaoqian Zhang, Gang Li. Effects of oxygen flows on optical properties, micro-structure and residual stress of Ta 2 O 5 films deposited by DIBS. Optik, 166, 278(2018).

Songwen Deng, Feng Wang, Shunfu Liu, Gang Li, Long Sun, Yuqi Jin. Residual stress prediction and control of Ta2O5/SiO2 multilayer based on layer structure designing[J]. Chinese Optics Letters, 2013, 11(s1): S10701
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