Bo Xue, Pinggang Jia, Guowen An, Jianhui Su, Haoquan Wang, Nan Yang, Jijun Xiong. High‑Precision Processing Technology of Quartz Glass with Ultraviolet Femtosecond Laser Filaments[J]. Chinese Journal of Lasers, 2024, 51(12): 1202423
- Chinese Journal of Lasers
- Vol. 51, Issue 12, 1202423 (2024)
Fig. 1. Schematic diagram of femtosecond filament principle
Fig. 2. Schematic diagram of laser processing system
Fig. 3. Schematic diagrams of laser filament processing. (a) Laser filament focusing; (b) scribe-cutting; (c) ring-cutting of microporous
Fig. 4. Influence of laser focusing position on processing morphology. (a) Schematic diagram of processing with different laser focusing positions; (b) relationship between damage depth and focusing position; (c) damage morphology
Fig. 5. Quartz glass morphology with increasing pulse energy at different laser frequencies. (a) 50 kHz; (b) 100 kHz; (c) 200 kHz; (d) surface morphology after cleaning; (e) cross-section of uncleaned optical filament damage
Fig. 6. Variation of damage depth and width with pulse energy at different laser frequencies. (a) Damage depth; (b) damage width
Fig. 7. Schematic of laser spot overlap
Fig. 8. Cross-sectional morphology of filament damage with different scanning speeds
Fig. 9. Laser processing topographic map with scanning number (n) from 1 to 10
Fig. 10. Cut section morphology of quartz glass. (a) Laser filament processing method; (b) progressive scanning method
Fig. 11. Processing morphology of quartz glass microporous. (a) Laser filament processing method; (b) conventional progressive scanning method
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Table 1. Physical and mechanical properties of quartz glass
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Table 2. Comparison of results between laser filament processing and progressive scanning methods
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