Achieving a sub-10 nm nanopore array in silicon by metal-assisted chemical etching and machine learning

Yun Chen; Yanhui Chen; Junyu Long; Dachuang Shi; Xin Chen; Maoxiang Hou; Jian Gao; Huilong Liu; Yunbo He; Bi Fan; Ching-Ping Wong; Ni Zhao

doi:10.1088/2631-7990/abff6a

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