Junhan LIU, Tianliang QU, Xuan ZHANG, Yanqing LIU, Changxin XIONG. Fabrication of ultra-high Q factor and millimeter-scale crystal echo wall microcavity[J]. Journal of Applied Optics, 2023, 44(4): 742

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- Journal of Applied Optics
- Vol. 44, Issue 4, 742 (2023)

Fig. 1. 3D simulation diagram of WGM microcavity

Fig. 2. Precision turning of WGM microcavity

Fig. 3. Precision polishing of WGM microcavity

Fig. 4. Fabricated WGM microcavity

Fig. 5. Test results of microcavity sidewall morphology

Fig. 6. Photomicrographs(200×)of microcavity surface

Fig. 7. Schematic diagram of microcavity Q factor measurement

Fig. 8. Test results of quality factor of WGM microcavity

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