Junhan LIU, Tianliang QU, Xuan ZHANG, Yanqing LIU, Changxin XIONG. Fabrication of ultra-high Q factor and millimeter-scale crystal echo wall microcavity[J]. Journal of Applied Optics, 2023, 44(4): 742
- Journal of Applied Optics
- Vol. 44, Issue 4, 742 (2023)
Fig. 1. 3D simulation diagram of WGM microcavity
Fig. 2. Precision turning of WGM microcavity
Fig. 3. Precision polishing of WGM microcavity
Fig. 4. Fabricated WGM microcavity
Fig. 5. Test results of microcavity sidewall morphology
Fig. 6. Photomicrographs（200×）of microcavity surface
Fig. 7. Schematic diagram of microcavity Q factor measurement
Fig. 8. Test results of quality factor of WGM microcavity
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