Process Research of Optical Inverted Cone for Interlayer Coupling

Jun-cheng LIU; Tian-yu SUN; Hui-min JIA; Xiao WANG; Ji-long TANG; Dan FANG; Xuan FANG; Deng-kui WANG; Bao-shun ZHANG; Zhi-peng WEI

doi:10.3788/gzxb20194812.1223003

Journals >Acta Photonica Sinica >Volume 48 >Issue 12 >Page 1223003 > Article

Acta Photonica Sinica
Vol. 48, Issue 12, 1223003 (2019)

Process Research of Optical Inverted Cone for Interlayer Coupling

Jun-cheng LIU^1、1, Tian-yu SUN^2、2, Hui-min JIA^1、1、*, Xiao WANG^1、1, Ji-long TANG^1、1, Dan FANG^1、1, Xuan FANG^1、1, Deng-kui WANG^1、1, Bao-shun ZHANG^2、2, and Zhi-peng WEI^1、1

Author Affiliations

¹State Key Laboratory of High Power Semiconductor Laser, Changchun University of Science and Technology, Changchun 130022, China

²Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, Jiangsu 215123, China

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DOI: 10.3788/gzxb20194812.1223003 Cite this Article

Jun-cheng LIU, Tian-yu SUN, Hui-min JIA, Xiao WANG, Ji-long TANG, Dan FANG, Xuan FANG, Deng-kui WANG, Bao-shun ZHANG, Zhi-peng WEI. Process Research of Optical Inverted Cone for Interlayer Coupling[J]. Acta Photonica Sinica, 2019, 48(12): 1223003 Copy Citation Text

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$有效折射率随波导宽度变化Effective refractive index varies with waveguide width$

Fig. 1. 有效折射率随波导宽度变化Effective refractive index varies with waveguide width

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Fig. 2. Schematic pattern and experimental flow diagram [Fig.(g)~(i)corresponds to Fig.(d)~(f)side view (only shows tip changes)]

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Fig. 3. 不同回流温度、回流时间对光刻胶的影响(每组显示锥形尖端部和末尾部的分层现象)Effect of different reflow temperatures and reflow times on the photoresist (Each group shows the stratification of the tapered tip and tail)

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Fig. 4. 绝热锥形SEM图像Adiabaticcone SEM image

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