LaF3 single-layer coatings were prepared by thermal boat evaporation at different deposition rates. Some of these films were annealed in vacuum. X-ray diffraction (XRD), Lambda 900 spectrophotometer and 355 nm Nd∶YAG laser system were employed to measure crystal structure, transmittance spectra and laser-induced damage threshold (LIDT) of the samples. Moreover, refractive index and extinction coefficient were obtained from the measured transmittance spectra. The results show that the crystallization and the preferential growth are benefited from the increase of the deposition rate, moreover, the refractive index is increased and the film gets more compact. But the defect makes the LIDT of the coating decline. In the other hand, the crystallization status will worsen if the deposition rate is too high. Meanwhile, a lot of pores appear in the film and the mechanical intensity of the film is deteriorated. Consequently, the refractive index and the LIDT are decreased. The LIDTs of the films after annealing are increased with different degree.