• Journal of Terahertz Science and Electronic Information Technology
  • Vol. 20, Issue 8, 804 (2022)
ZHAOYarui*, CUIZixiao, WUDing, FENGChunlei, and DING Hongbin
Author Affiliations
  • [in Chinese]
  • show less
    DOI: 10.11805/tkyda2021278 Cite this Article
    ZHAOYarui, CUIZixiao, WUDing, FENGChunlei, DING Hongbin. Experimental and simulation of diagnosing plasma electron density by THz spectroscopy[J]. Journal of Terahertz Science and Electronic Information Technology , 2022, 20(8): 804 Copy Citation Text show less
    References

    [4] WANG Yong,LI Cong,SHI Jielin,et al. Measurement of electron density and electron temperature of a cascaded arc plasma using laser Thomson scattering compared to an optical emission spectroscopic approach[J]. Plasma Science Technology, 2017,19(11): 115403. doi:10.1088/2058-6272/aa861d.

    [5] KOLNER B H,BUCKLES R A,CONKLIN P M,et al. Plasma characterization with terahertz pulses[J]. IEEE Journal of Selected Topics in Quantum Electronics, 2008,14(2):505-512. doi:10.1109/JSTQE.2007.913395.

    [6] ANDO A, KUROSE T, REYMOND V, et al. Electron density measurement of inductively coupled plasmas by Terahertz Time-Domain Spectroscopy(THz-TDS)[J]. Journal of Applied Physics, 2011,110(7):073303. doi:10.1063/1.3633488.

    [7] ZHENG Zhigang, HUANG Yindong, GUO Quan, et al. Filament characterization via resonance absorption of terahertz wave[J]. Physics of Plasmas, 2017,24(10):103303.1-10. doi:10.1063/1.5004551.

    [8] ZHAO Yarui,WANG Yong,SHI Jielin,et al. Comparison of Terahertz time domain spectroscopy and laser Thomson scattering for electron density measurements in inductively coupled plasma discharges[J]. Journal of Instrumentation, 2019, 14(12): C12019. doi:10.1088/1748-0221/14/12/C12019.

    [10] BREZMES A O, BREITKOPF C J V. Fast and reliable simulations of argon inductively coupled plasma using COMSOL[J]. Vacuum, 2015,116(1):65-72. doi:10.1016/j.vacuum.2015.03.002.

    ZHAOYarui, CUIZixiao, WUDing, FENGChunlei, DING Hongbin. Experimental and simulation of diagnosing plasma electron density by THz spectroscopy[J]. Journal of Terahertz Science and Electronic Information Technology , 2022, 20(8): 804
    Download Citation