• Optics and Precision Engineering
  • Vol. 20, Issue 1, 31 (2012)
CHEN Ji-min*, HE Chao, ZHOU Wei-ping, and SHEN Xue-fei
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/ope.20122001.0031 Cite this Article
    CHEN Ji-min, HE Chao, ZHOU Wei-ping, SHEN Xue-fei. Fabrication of binary diffractive optical element by fiber laser induced backside dry etching[J]. Optics and Precision Engineering, 2012, 20(1): 31 Copy Citation Text show less
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    [1] Sun Shufeng, Shao Yong. Water-Assisted Laser Induced Plasma Backside Etching of Pyrex7740 Glass[J]. Laser & Optoelectronics Progress, 2017, 54(10): 101404

    [2] LIU Min-zhe, LIU Hua, XU Wen-bin, WANG Tai-sheng, LU Zhen-wu, YU Wei-xing. Membrane photon sieve for space telescope[J]. Optics and Precision Engineering, 2014, 22(8): 2127

    CHEN Ji-min, HE Chao, ZHOU Wei-ping, SHEN Xue-fei. Fabrication of binary diffractive optical element by fiber laser induced backside dry etching[J]. Optics and Precision Engineering, 2012, 20(1): 31
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