Research on control system of the liquid source MOCVD

[in Chinese] and [in Chinese]

Author Affiliations

[in Chinese]

show less

DOI: Cite this Article

[in Chinese], [in Chinese]. Research on control system of the liquid source MOCVD[J]. Optical Instruments, 2007, 29(3): 76 Copy Citation Text

show less

References

[3] Manasevit H M.Single crystal galluim aresenide on insulating substrates[J].Appl Phys Lett,1968,12:156.

[4] Manasevit H M.The use of metalorganils in the preparation of semicondutor Materials[J].J Cryst Growth,1972,13/14:306.

[in Chinese], [in Chinese]. Research on control system of the liquid source MOCVD[J]. Optical Instruments, 2007, 29(3): 76

Download Citation