[1] Sugioka K and Cheng Y 2014 Ultrafast lasers—reliable tools for advanced materials processing Light 3 e149
[2] Sugioka K 2017 Progress in ultrafast laser processing and future prospects Nanophotonics 6 393–413
[3] Ancona A, R.ser F, Rademaker K, Limpert J, Nolte S and Tünnermann A 2008 High speed laser drilling of metals using a high repetition rate, high average power ultrafast fiber CPA system Opt. Express 16 8958–68
[4] Eaton S M, Zhang H B, Herman P R, Yoshino F, Shah L, Bovatsek J and Arai A Y 2005 Heat accumulation effects in femtosecond laser-written waveguides with variable repetition rate Opt. Express 13 4708–16
[5] Kerse C et al 2016 Ablation-cooled material removal with ultrafast bursts of pulses Nature 537 84–8
[6] Bonamis G, Audouard E, H.nninger C, Lopez J, Mishchik K, Mottay E and Manek-H.nninger I 2020 Systematic study of laser ablation with GHz bursts of femtosecond pulses Opt. Express 28 27702–14
[7] Metzner D, Lickschat P and Wei.mantel S 2020 High-quality surface treatment using GHz burst mode with tunable ultrashort pulses Appl. Surf. Sci. 531 147270
[8] Hodgson N, Allegre H, Starodoumov A and Bettencourt S 2020 Femtosecond laser ablation in burst mode as a function of pulse fluence and intra-burst repetition rate J. Laser Micro Nanoeng. 15 236–44
[9] Metzner D, Lickschat P and Wei.mantel S 2021 Optimization of the ablation process using ultrashort pulsed laser radiation in different burst modes J. Laser Appl. 33 012057
[10] .emaitis A, Gaidys M, Gecys P, Barkauskas M and Gedvilas M 2021 Femtosecond laser ablation by bibursts in the MHz and GHz pulse repetition rates Opt. Express 29 7641–53
[11] Obata K, Caballero-Lucas F and Sugioka K 2021 Material processing at GHz burst mode by femtosecond laser ablation J. Laser Micro Nanoeng. 16 19–23
[12] Balachninaite V, Eicaitis V 2021 Laser micromachining of steel e O, Tamuliencas L and Vaiand copper using femtosecond laser pulses in GHz burst mode Results Phys. 22 103847
[13] Mishchik K, Bonamis G, Qiao J, Lopez J, Audouard E, Mottay E, H.nninger C and Manek-H.nninger I 2019 High-efficiency femtosecond ablation of silicon with GHz repetition rate laser source Opt. Lett. 44 2193–6