Fig. 1. Scheme of oxidative LIPSS formation on metal/Si hybrid films by femtosecond laser irradiation. The crossing angle between the scanning direction and laser polarization direction is defined as θ，the incident laser polarization is controlled by a half-wave plate

Fig. 2. Optical microscope images of one-dimensional LIPSS obtained by different crossing angles between scanning direction and laser polarization，the scanning direction is along x-axis（V：sample scanning direction；E₀：laser polarization direction）

Fig. 3. FDTD-based numerical simulation of electric field distribution at Si-air interface when embedding a silica nanostripe into Pt/Si hybrid film

Fig. 4. Optical microscopy images of periodic nanostructures obtained by zigzag scanning（black arrows）in three different crossing angles between scanning direction and laser polarization（The dotted the solid red circles represent the initial and final position of the laser spot，respectively. The distance between the upper and lower scanning spots is 10 μm. The black box indicates splicing area between the adjacent two scans）