Surface Acoustic Wave(SAW) actuators have been dramatically required for a micro actuator not only due to their direct driving objects,low energy losses and drive errors,but also their higher work frequencies,shorter SAW waves,small dimensions,and low noises. In this paper,an applicable (SAW) micro actuator is implemented by fabricating microelectrodes on a LiNbO₃ substrate and by using MEMS technologies.In order to control the drive direction more effectively,a new type of IDT,Floating Electrode Unidirectional Transducer (FEUDT) is developed and the optimal designs are proposed and compared with others by ANSYS. The dimensions of the FEUDT are 5 mm in the aperture size,80 μm in the pitch,6.7 μm in the strip width,and 0.8 μm in the thickness. In comparison with other types of SAW actuators,the floating electrode unidirectional SAW actuator has a higher frequency vibration near to 50 MHz and more effectively controllable drive direction ability,which will be very useful for micro optical controlling systems in microminiaturization and controllability.