• Chinese Optics Letters
  • Vol. 11, Issue s1, S10213 (2013)
Cunding Liu, Chun Guo, Mingdong Kong, and Bincheng Li
DOI: 10.3788/col201311.s10213 Cite this Article Set citation alerts
Cunding Liu, Chun Guo, Mingdong Kong, Bincheng Li, "Geometry optimization in planetary rotation stage for thickness uniformity of films on spherical substrates," Chin. Opt. Lett. 11, S10213 (2013) Copy Citation Text show less
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Data from CrossRef

[1] Viktor Marushka, Oleg Zabeida, Ludvik Martinu. Distribution of ion current density on a rotating spherical cap substrate during ion-assisted deposition. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 32, 061513(2014).

Cunding Liu, Chun Guo, Mingdong Kong, Bincheng Li, "Geometry optimization in planetary rotation stage for thickness uniformity of films on spherical substrates," Chin. Opt. Lett. 11, S10213 (2013)
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