• Chinese Optics Letters
  • Vol. 11, Issue s1, S10213 (2013)
Cunding Liu, Chun Guo, Mingdong Kong, and Bincheng Li
DOI: 10.3788/col201311.s10213 Cite this Article Set citation alerts
Cunding Liu, Chun Guo, Mingdong Kong, Bincheng Li. Geometry optimization in planetary rotation stage for thickness uniformity of films on spherical substrates[J]. Chinese Optics Letters, 2013, 11(s1): S10213 Copy Citation Text show less
References

[1] M. Gross, S. Dligatch, and A. Chtanov, Appl. Opt. 50, C316 (2011).

[2] S. Dligatch, M. Gross, and A. Chtanov, Proc. SPIE 8168, 816803 (2011).

[3] J. B. Oliver and D. Talbot, Appl. Opt. 45, 3097 (2006).

[4] B. S. Ramprasad and T. S. Radha, Thin Solid Films 15, 55 (1973).

[5] K. H. Behrndt, in Transactions of the Tenth National Vacuum Symposium of the American Vacuum Society, G. H. Bancroft, ed. (Macmillan, 1963).

[6] C. Liu, M. Kong, C. Guo, W. Gao, and B. Li, Opt. Express 20, 23790 (2012).

[7] H. A. Macleod, Thin-film Optical Filters (Academic Press, New York, 2001), p.488-497.

[8] B. Sassolas , Q. Benoit, R. Flaminio, D. Forest, J. Franc, M. Galimberti, A. Lacoudre, C. Michel, J. L. Montorio, N. Morgado, and L. Pinard, Proc. SPIE 8168, 81681Q (2011).

[9] H. H. Bauer, M. Heller, and N. Kaiser, Proc. SPIE 2776, 353 (1995).

[10] P. Kelkar, B. Tirri, R. Wilklow, and D. Peterson, Proc. SPIE 7606, 706708 (2008).

[11] A. Perrin and J.P. Gailliard, Proc. SPIE 1782, 238 (1992).

[12] F. Wang, R. Crocker, and R. Faber, in Proceedings of Optical Interference Coatings MB, MB3 (2010).

[13] L. Holland and W. Steckelmacher, Vacuum 2, 346 (1952).

[14] F. Villa and O. Pompa, Appl. Opt. 38, 695 (1999).

[15] C. C. Jaing, Appl. Opt. 50, C159 (2011).

[16] C. Zaczek, A. Pazidis, and H. Feldermann , in Proceedings of Optical Interference Coatings FA, FA1 (2007).

Data from CrossRef

[1] Viktor Marushka, Oleg Zabeida, Ludvik Martinu. Distribution of ion current density on a rotating spherical cap substrate during ion-assisted deposition. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 32, 061513(2014).

Cunding Liu, Chun Guo, Mingdong Kong, Bincheng Li. Geometry optimization in planetary rotation stage for thickness uniformity of films on spherical substrates[J]. Chinese Optics Letters, 2013, 11(s1): S10213
Download Citation