• Optics and Precision Engineering
  • Vol. 17, Issue 6, 1262 (2009)
ZHANG Yang-jian* and SAN Hai-sheng
Author Affiliations
  • [in Chinese]
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    DOI: Cite this Article
    ZHANG Yang-jian, SAN Hai-sheng. MEMS hybrid power-generator from vibration energy[J]. Optics and Precision Engineering, 2009, 17(6): 1262 Copy Citation Text show less

    Abstract

    A hybrid vibration-powered microgenerator has been presented by combining the structures of piezoelectric generator and electrostatic generator,and the structure of the microgenerator is optimized by a Finite Element Method(FEM) to obtain the desired low resonant frequency. Then,an analytic model is established to predict the behavior of the hybrid power-generator and a MATLAB/SIMULINK is utilized for the numerical simulation. The simulated results reveal that the hybrid power-generator has a higher output power than those of two energy harvesting mechanisms at a special resonant frequency. For a resonant frequency of 282 Hz,the simulation result shows the output power from the hybrid mechanism is 4.85 μm,which doubles 2.11 μW from the original capacitive mechanism.
    ZHANG Yang-jian, SAN Hai-sheng. MEMS hybrid power-generator from vibration energy[J]. Optics and Precision Engineering, 2009, 17(6): 1262
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