• Chinese Journal of Lasers
  • Vol. 36, Issue 2, 476 (2009)
Zhu Pei* and Zhu Jianqiang
Author Affiliations
  • [in Chinese]
  • show less
    DOI: Cite this Article Set citation alerts
    Zhu Pei, Zhu Jianqiang. Influences of the Substrate Stress on Element Surface Figure in Vacuum Evaporating Deposition[J]. Chinese Journal of Lasers, 2009, 36(2): 476 Copy Citation Text show less

    Abstract

    In vacuum evaporating deposition, the surface deformation of the optical elements was primarily affected by the substrate stress redistribution including the gravitational stress and the residual stress before and after deposition. A model was built to analyze the effects of substrate stress, the results proved that an interaction stress in the substrate-film interface induced by the gravitational stress in the substrate in the vacuum evaporating deposition produced very little deformation of the substrate. Therefore, the irregular deformation of the optical element induced in vacuum evaporating deposition was determined by the residual stress of the substrate mostly. The experimental results show that the irregular deformation of the substrate caused by the residual stress can be eliminated by fine annealing the substrate before being polished.
    Zhu Pei, Zhu Jianqiang. Influences of the Substrate Stress on Element Surface Figure in Vacuum Evaporating Deposition[J]. Chinese Journal of Lasers, 2009, 36(2): 476
    Download Citation