Infrared Absorption Analysis of Microbolometer with Two-Layer Umbrella-Shaped Openings

JIANG Junxian; WANG Tao; CHEN Chao; WU Zhiming; WANG Jun

doi:10.16818/j.issn1001-5868.2022082201

Journals >Semiconductor Optoelectronics >Volume 44 >Issue 1 >Page 44 > Article

Semiconductor Optoelectronics
Vol. 44, Issue 1, 44 (2023)

Infrared Absorption Analysis of Microbolometer with Two-Layer Umbrella-Shaped Openings

JIANG Junxian, WANG Tao, CHEN Chao^*, WU Zhiming, and WANG Jun

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[in Chinese]

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DOI: 10.16818/j.issn1001-5868.2022082201 Cite this Article

JIANG Junxian, WANG Tao, CHEN Chao, WU Zhiming, WANG Jun. Infrared Absorption Analysis of Microbolometer with Two-Layer Umbrella-Shaped Openings[J]. Semiconductor Optoelectronics, 2023, 44(1): 44 Copy Citation Text

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References

[5] Yutaka Tanaka, Akio Tanaka, Kiyoshi Lida, et al. Performance of 320×240 uncooled bolometer type infrared focal plane arrays［J］. Proc. SPIE, 2003, 5074: 414-424.

[11] Howard P E, Clarke J E. DRS U6000 640×480 VOX uncooled IR focal plane［J］. Proc. SPIE, 2002, 4721: 48-55.

JIANG Junxian, WANG Tao, CHEN Chao, WU Zhiming, WANG Jun. Infrared Absorption Analysis of Microbolometer with Two-Layer Umbrella-Shaped Openings[J]. Semiconductor Optoelectronics, 2023, 44(1): 44

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