Jichao LI, Xiangping ZHU, Xiangxin LI, Jingpeng HU, Cunyu LI, Wei ZHAO. Investigation on the Preparation of TiO2∶Al2O3 Nanocomposite Film Applied to the Conductive Layer of Microchannel Plate[J]. Acta Photonica Sinica, 2023, 52(6): 0631003
- Acta Photonica Sinica
- Vol. 52, Issue 6, 0631003 (2023)
Fig. 1. Pulse schematic of TiO2∶Al2O3 nanocomposite film by atomic layer deposition
Fig. 2. Structure of TiO2∶Al2O3 nanocomposite film
Fig. 3. Periodic arrangement diagram of microchannel plate array
Fig. 4. MCP single channel conductive layer expansion diagram
Fig. 5. Relationship between TiO2 cycle percentage and film square resistance
Fig. 6. SEM images of TiO2：Al2O3 Nanocomposite film
Fig. 7. Bulk resistance of MCP under different voltages
Fig. 8. The gain and the voltage of ALD-MCP
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Table 1. ALD experimental parameters of TiO2∶Al2O3 nanocomposite film
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