[1] MANALIS S R, MINNE S C, ATALAR A, et al.. Interdigital cantilevers for atomic force microscopy ［J］. Appl. Phys. Lett., 1996, 69(25):3944-3946.
[2] YARALIOGLU G G, ATALAR A, MANALIS S R, et al.. Analysis and design of an interdigital cantilever as a displacement sensor ［J］. Appl. Phys., 1998, 83(12): 7405-7414.
[3] HALL N A， DEGERTEKIN F L . Integrated optical interferometric detection method for micromachined capacitive acoustic transducers［J］, Appl. Phys. Lett., 2002,80(20): 3859-3861.
[4] LOH N C, SCHMIDT M A, MANALIS S R. Sub-10 cm3 interferometric accelerometer with nano-g resolution ［J］. JMEMS, 2002, 11(3): 182-187.
[5] TORUN H, UREY H. Uncooled thermo-mechanical detector array with optical readout ［J］. Opto-Electron. Rev., 2006,14(1): 55-60.
[6] SAVRAN C A, BURG T P , FRITZ J, et al.. Microfabricated mechanical biosensor with inherently differential readout ［J］. Appl. Phys. Lett., 2003, 83(8): 1659-1661.
[7] TORUN H. A micromachined membrane-based active probe for biomolecular mechanics measurement ［J］. Nanotechnology, 2007, 18(16): 53-55.
[8] LOH N C, SCHMIDT M A, MANALIS S R. Sub-10 cm interferometric accelerometer with nano-g resolution ［J］. Microelectromech. Syst., 2002, 11(3): 182-187.
[9] WU K, YE X Y, CHEN F, et al.. Micromachined sandwich interferometric accelerometer with force feedback control ［J］. Nanotechnology and Precision Engineering, 2011, 9(1): 21-25. (in Chinese)
[10] GORP B V, ONARAN A G, DEGERTEKIN F L. Integrated dual grating method for extended range interferometric displacement detection in probe microscopy ［J］. App. Phys. Lett., 2007, 91(8): 083101-3.
[11] FERHANOGLY O, TOY M F, UREY H. Two-wavelength grating interferometry for MEMS sensors ［J］. IEEE Photon. Technol. Lett., 2007, 19(23): 1895-1897.
[12] FERHANOGLU O, UREY H. Sensitivity enhancement of bimaterial MOEMS thermal imaging sensor array using 2-λ readout ［C］. Proc. SPIE, 2010,7718.
[13] SHIN D, KIN B. A laser interferometer encoder with two micromachined gratings generating phase-shifted quadrature ［J］. Micromech. Microeng., 2011, 21(8): 085036-1-9.
[14] WU K, YE X Y, LIU L T, et al.. Micro-displacement measurement based on integrated diffraction grating ［J］. Nanotechnology and Precision Engineering, 2009,7(1): 56-59. (in Chinese)
