Demonstration of electrically injected vertical-cavity surface-emitting lasers with post-supported high-contrast gratings

Jing Zhang; Chenxi Hao; Wanhua Zheng; Dieter Bimberg; Anjin Liu

doi:10.1364/PRJ.447633

Journals >Photonics Research >Volume 10 >Issue 5 >Page 1170 > Article

Photonics Research
Vol. 10, Issue 5, 1170 (2022)

Demonstration of electrically injected vertical-cavity surface-emitting lasers with post-supported high-contrast gratings | On the Cover

Jing Zhang^1、2, Chenxi Hao^1、2, Wanhua Zheng^1、2、3, Dieter Bimberg^4、5, and Anjin Liu^1、2、*

Author Affiliations

¹State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³Key Laboratory of Solid-State Optoelectronics Information Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

⁴Bimberg Chinese-German Center for Green Photonics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

⁵Institute of Solid State Physics and Center of Nanophotonics, Technische Universität Berlin, 10623 Berlin, Germany

show less

DOI: 10.1364/PRJ.447633 Cite this Article Set citation alerts

Jing Zhang, Chenxi Hao, Wanhua Zheng, Dieter Bimberg, Anjin Liu. Demonstration of electrically injected vertical-cavity surface-emitting lasers with post-supported high-contrast gratings[J]. Photonics Research, 2022, 10(5): 1170 Copy Citation Text

EndNote(RIS)

BibTex

Plain Text

show less

(a) Schematics of the 940 nm HCG-VCSEL. The grating period is Λ, a is the width of the grating bar, the duty cycle (DC) is defined as a/Λ, and tg is the thickness of the grating. (b) Field distribution of the resonance mode of our HCG-VCSELs.

Fig. 1. (a) Schematics of the 940 nm HCG-VCSEL. The grating period is Λ, a is the width of the grating bar, the duty cycle (DC) is defined as a/Λ, and tg is the thickness of the grating. (b) Field distribution of the resonance mode of our HCG-VCSELs.

Download full size | View in the Article

(a) Reflectivity contour of the HCG as a function of normalized thickness (tg/Λ) and normalized wavelength (λ/Λ) under normal incidence. (b) Reflectivity spectra of the HCGs for different bar widths for a grating period of 648 nm and a thickness of about a half wavelength.

Fig. 2. (a) Reflectivity contour of the HCG as a function of normalized thickness (tg/Λ) and normalized wavelength (λ/Λ) under normal incidence. (b) Reflectivity spectra of the HCGs for different bar widths for a grating period of 648 nm and a thickness of about a half wavelength.

Download full size | View in the Article

Fig. 3. Field distribution of the fundamental mode of the designed HCG-VCSEL with an oxide aperture of 4 μm in diameter. The resonant wavelength is 941.6 nm.

Download full size | View in the Article

Fig. 4. Fabrication process flow of the HCG-VCSEL.

Download full size | View in the Article

Fig. 5. (a) Infrared microscope image of the mesa after oxidation. The dashed ellipse indicates the profile of the oxidation edge. The size of the oxide aperture is about 4 μm×8 μm. (b) SEM image of a typical air-suspended HCG with two posts of the HCG-VCSEL.

Download full size | View in the Article

Fig. 6. (a) L-I-V curves of an HCG-VCSEL. (b) Lasing spot image from the CCD of the HCG-VCSEL at 2 mA. (c) L-I-V curves of the device without an HCG. (d) Image from the CCD of the devices without HCGs at 6 mA.

Download full size | View in the Article

Fig. 7. (a) Spectra of the HCG-VCSEL under CW operation. (b) Spectra of the device without an HCG at different currents.

Download full size | View in the Article

Fig. 8. Effective mode lengths of the HCG-VCSELs with different pair numbers of the p-DBR. The TM HCG has a grating period of 380 nm and a bar width of 230 nm. The thickness of the HCG is about a half wavelength.

Download full size | View in the Article

Fig. 9. Calculated small-signal modulation responses of the TM HCG-VCSEL with a λ/2-cavity and an air thickness of one-quarter wavelength beneath the HCG at different currents.

Download full size | View in the Article

Parameter	Value
Confinement factor $Γ$	0.065
Cavity length (μm)^a	0.754
Injection efficiency $η_{i}$	0.8
Material gain coefficient $g$ ( ${cm}^{- 1}$ )	1800
Nonlinear gain coefficient $ε$ ( ${cm}^{3}$ )	$1.5 \times 10^{- 17}$
Carrier density reduction $N_{s}$ ( ${cm}^{- 3}$ )	$- 0.4 \times 10^{18}$
Carrier density at transparency $N_{tr}$ ( ${cm}^{- 3}$ )	$1.8 \times 10^{18}$