L625 DIAL system was developed in Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences in 1993. This system has been used to monitor roundly atmospheric ozone profiles at Hefei since 1996. Ozone data measured by L625 DIAL from 1996 to 2009 were analyzed, and comparisons of data were taken between L625 DIAL and AURA satellite. Monthly and season average ozone profiles over Hefei were presented. Ozone change trend was also analyzed.