[1] Gong Hailong, Liu Zhihui, Li Guojun, et al.. Fidelity study of diffractive laser beam expander[J]. Chinese J Lasers, 2014, 41(9): 0902006.

[2] Song Qiang, Zhu Jing, Wang Jian, et al.. A mixed gradient algorithm for high performance DOE design in off-axis lithography illumination system[J]. Acta Optica Sinica, 2015, 35(1): 0122005.

[3] Mao Wenfeng, Zhang Xin, Qu Hemeng, et al.. Broad dual-band kinoform infrared double-layer diffractive optical system design[J]. Acta Optica Sinica, 2014, 34(10): 1022002.

[4] Yuri V Miklyaev, Waleri Imgrunt, Vladimir S Pavelyev, et al.. Novel continuously shaped diffractive optical elements enable high efficiency beam shaping[C]. SPIE, 2010, 7640: 764024.

[5] Y V Miklyaev, A Krasnaberski, M Ivanenko, et al.. Efficient diffractive optical elements from glass with continuous surface profiles[C]. SPIE, 2011, 7913: 79130B.

[6] H Pang, S Yin, G Zheng, et al.. Design method of diffractive optical element with large diffraction angle[C]. SPIE, 2014, 9271: 92711M.

[7] NPK Cotter, T W Preist, J R Sambles. Scattering-matrix approach to multilayer diffraction[J]. J Opt Soc Am, 1995, 12(5): 1097-1103.

[8] M G Moharam, T K Gaylord. Diffraction analysis of dielectric surface-relief gratings[J]. J Opt Soc Am A, 1982, 72(10): 1385-1392.

[9] Jiang P L, Chu H, Hench J, et al.. Forward solve algorithms for optical critical dimension metrology[C]. SPIE, 2008, 6922: 69221O.

[10] Wang Zhongfei, Zhang Dawei, Wang Qi, et al.. Development trends of subwavelength metal gratings[J]. Laser & Optoelectronics Progress, 2015, 52(1): 010002.

[11] Louis A Romero, Fred M Dickey. Theory of optimal beam splitting by phase gratings. I. One-dimensional gratings[J]. J Opt Soc Am A, 2007, 24(8): 2280-2295.

[12] Z Li, Zheng G, He P A, et al.. All silicon nanorod-based Dammann gratings[J]. Opt Lett, 2015, 40(18): 4285-4288.

[13] Leng Yanbing, Dong Lianhe, Sun Yanjun. Study on 1×11 Dammann with sub-wavelength structure[J]. Infrared and Laser Engineering, 2014, 43(3): 812-817.

[14] Yang Jian. The Vector Diffraction Design and Parallel Direct Writing Production of Binary Optical Elements[D]. Changsha: National University of Defense Technology, 2004.

[15] J W Goodman. Introduction to Fourier Optics[M]. Qin Kecheng, Liu Peisen, Chen Jiabi, et al. Transl.. (3rd edition). Beijing: Publishing House of Electronics Industry, 2006: 60-61.

[16] M G Moharam, T K Gaylord, E B Grann, et al.. Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings[J]. J Opt Soc Am A, 1995, 12(5): 1068-1076.

[17] Liu Zhihui, Yang Huan, Shi Zhendong, et al.. Homogenization of the semiconductor laser planar array using diffractive micro-lens array [J]. Chinese J Lasers, 2014, 41(1): 0102005.

[18] M G Moharam, T K Gaylord, D A Pommet, et al.. Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach[J]. J Opt Soc Am A, 1995, 12(5): 1077-1086.

[19] L Li. Use of Fourier series in the analysis of discontinuous periodic structures[J]. J Opt Soc Am A, 1996, 13(9): 1870-1876.

[20] Nikolay M Lyndin, Olivier Parriaux, Alexander V Tishchenko. Modal analysis and suppression of the Fourier modal method instabilities in highly conductive gratings[J]. J Opt Soc Am A, 2007, 24(12): 3781-3788.