• Acta Photonica Sinica
  • Vol. 51, Issue 1, 0151122 (2022)
Yu ZOU1、2, Wenjing JIANG1、*, and Wen OU1
Author Affiliations
  • 1Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China
  • 2University of China Academy of Sciences,Beijing,100049,China
  • show less
    DOI: 10.3788/gzxb20225101.0151122 Cite this Article
    Yu ZOU, Wenjing JIANG, Wen OU. Study on Metasurface Ultra-narrowband Infrared MEMS Light Source[J]. Acta Photonica Sinica, 2022, 51(1): 0151122 Copy Citation Text show less
    MEMS infrared light source using metasurface
    Fig. 1. MEMS infrared light source using metasurface
    Propagation of light on super-surface of metal-insulator-metal structure
    Fig. 2. Propagation of light on super-surface of metal-insulator-metal structure
    Schematic diagram of equivalent model
    Fig. 3. Schematic diagram of equivalent model
    The structure and size of the model
    Fig. 4. The structure and size of the model
    The relationship between peak wavelength and emissivity of the peak wavelength and each size
    Fig. 5. The relationship between peak wavelength and emissivity of the peak wavelength and each size
    The influence of different key size on FWHM
    Fig. 6. The influence of different key size on FWHM
    Comparison between model and Simulation about L's influence on light source performance
    Fig. 7. Comparison between model and Simulation about L's influence on light source performance
    Impedance analysis of simulation results
    Fig. 8. Impedance analysis of simulation results
    Yu ZOU, Wenjing JIANG, Wen OU. Study on Metasurface Ultra-narrowband Infrared MEMS Light Source[J]. Acta Photonica Sinica, 2022, 51(1): 0151122
    Download Citation