Researching | Design and Control of an Ultraprecision Stage Used in Grating TiIing

Journals >Collection Of theses on high power laser and plasma physics >Volume 3 >Issue 1 >Page 85 > Article

Collection Of theses on high power laser and plasma physics
Vol. 3, Issue 1, 85 (2005)

Design and Control of an Ultraprecision Stage Used in Grating TiIing

[in Chinese], [in Chinese], and [in Chinese]

Author Affiliations

Shanghai Institute of Optics and Fine Mechanics, the Chinese Academy of Sciences, Shanghai 201800, China

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[in Chinese], [in Chinese], [in Chinese]. Design and Control of an Ultraprecision Stage Used in Grating TiIing[J]. Collection Of theses on high power laser and plasma physics, 2005, 3(1): 85 Copy Citation Text

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[in Chinese], [in Chinese], [in Chinese]. Design and Control of an Ultraprecision Stage Used in Grating TiIing[J]. Collection Of theses on high power laser and plasma physics, 2005, 3(1): 85

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