Performance of micro-nano composite structure enhanced silicon-based terahertz modulator

SHEN Chaoyang; WANG Yuansheng; HE Yulian; YANG Qinghui; CHEN Zhi; WEN Qiye

doi:10.11805/tkyda2020093

[1] FEDERICI J,MOELLER L. Review of terahertz and subterahertz wireless communications[J]. Journal of Applied Physics, 2010,107(11):111101.

[2] DING L,DING X,YE Y Y,et al. Overview of passive terahertz imaging systems for indoor concealed detection[J]. Chinese Optics, 2017,10(1):114-121.

[3] FUKASAWA R. Terahertz imaging widespread industrial application in non-destructive inspection and chemical analysis[J]. IEEE Transactions on Terahertz Science and Technology, 2015,5(6):1121-1127.

[4] SENSALE-RODRIGUEZ B,RAFIQUE S,YAN R, et al. Terahertz imaging employing graphene modulator arrays[J]. Optics Express, 2013,21(2):2324-2330.

[5] XIE Z,WANG X,YE J,et al. Spatial terahertz modulator[J]. Scientific Reports, 2013(3):3347.

[6] SHI Zhongwei,CAO Xingxing,WEN Qiye,et al. Terahertz modulators based on silicon nanotip array[J]. Advanced Optical Materials, 2018,6(2):1700620.

[7] WEIS P,GARCIA-POMAR J L,HOH M,et al. Spectrally wide-band terahertz wave modulator based on optically tuned graphene[J]. ACS Nano, 2012,6(10):9118-9124.

[8] CHEN Sai,FAN Fei,MIAO Yinping,et al. Ultrasensitive terahertz modulation by silicon-grown MoS2 nanosheets[J]. Nanoscale, 2016,8(8):4713-4719.

[9] YOO H K,LEE S G,KANG C,et al. Terahertz modulation on angle-dependent photoexcitation in organic-inorganic hybrid structures[J]. Applied Physics Letters, 2013,103(15):151116.

[10] LIU Weimin,FAN Fei,XU Shitong,et al. Terahertz wave modulation enhanced by laser processed PVA film on Si substrate[J]. Scientific Reports, 2018,8(1):8304.

[12] JIANG J,LI S B,JIANG Y D,et al. Mechanism of optical absorption enhancement of surface textured black silicon[J]. Journal of Materials Science:Materials in Electronics, 2013,24(2):463-466.

[13] ZHU Liqiang,LI Xiang,YAN Zhonghui,et al. Dual functions of anti-reflectance and surface passivation of the atomic layer deposited Al2O3 films on crystalline silicon substrates[J]. IEEE Electron Device Letters, 2012,33(12):1753-1755.

[14] HOEX B,GIELIS J J H,VAND-DE-SANDEN M C M,et al. On the c-Si surface passivation mechanism by the negative- charge-dielectric Al2O3[J]. Journal of Applied Physics, 2008,104(11):113703.

[15] KANNEGULLA A,ITRAT-BIN-SHAMS M,LIU Lei,et al. Photo-induced spatial modulation of THz waves:opportunities and limitations[J]. Optics Experss, 2015,23(25):32098.