A GRIN Fizeau Interferometer for the Profile Measurement of Micro-surfaces

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Chinese Journal of Lasers >Volume 26 >Issue 10 >Page 907 > Article

Chinese Journal of Lasers
Vol. 26, Issue 10, 907 (1999)

A GRIN Fizeau Interferometer for the Profile Measurement of Micro-surfaces

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A GRIN Fizeau Interferometer for the Profile Measurement of Micro-surfaces[J]. Chinese Journal of Lasers, 1999, 26(10): 907 Copy Citation Text

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Abstract

A Fizeau type interferometer reported here is composed of a LD-pumped single-mode double-frequency Nd:YVO4 laser, a different-size GRIN (Gradient Index) rod lens and a 3-D fine regulation stand. It is used for the measurement of the profile, deformation and oscillatory feature of micro-surfaces simultaneously. The experimental results and theoretical analysis are given.

Keywords

fiber sensor Fizeau interferometer GRIN

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