• Journal of Infrared and Millimeter Waves
  • Vol. 39, Issue 3, 290 (2020)
Chao WANG1、2, Ning LI1, Ning DAI1、*, Wang-Zhou SHI3, and Gu-Jin HU3
Author Affiliations
  • 1State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai200083, China
  • 2University of Chinese Academy of Sciences, Beijing100049, China
  • 3Department of Physics, College of Mathematics and Science, Shanghai Normal University, Shanghai20024, China
  • show less
    DOI: 10.11972/j.issn.1001-9014.2020.03.004 Cite this Article
    Chao WANG, Ning LI, Ning DAI, Wang-Zhou SHI, Gu-Jin HU. Ion-implanted Si:As blocked impurity band detectors for VLWIR detection[J]. Journal of Infrared and Millimeter Waves, 2020, 39(3): 290 Copy Citation Text show less

    Abstract

    An ion-implant technique for fabricating Si:As blocked impurity band detectors for VLWIR detection had been investigated, and the detectors with good photoelectric response performance had been demonstrated by optimizing both the processing condition and the device structural parameters together with material characteristic parameters. At 5 K temperature, with a dc bias voltage of -3.8 V, the peak response wavelength of the fabricated devices is 23.8 μm, the blackbody responsivity is 3.7 A/W, and the detectivity is 5.3×1013 cm?Hz1/2/W at 3.2 V, which are comparable to (and even superior to) those reported in literatures. Especially, the device manufacturing process is compatible with that for fabrication of integrated circuit, and the detectors can be integrated with readout circuits on one chip, resulting in a remarkable reduction in produce cost and a significant improvement in the imaging performance.
    Chao WANG, Ning LI, Ning DAI, Wang-Zhou SHI, Gu-Jin HU. Ion-implanted Si:As blocked impurity band detectors for VLWIR detection[J]. Journal of Infrared and Millimeter Waves, 2020, 39(3): 290
    Download Citation