Capacitive pressure sensor with circular island structure

ZOU Li-ming; GUO Hang

Journals >Optics and Precision Engineering >Volume 17 >Issue 6 >Page 1385 > Article

Optics and Precision Engineering
Vol. 17, Issue 6, 1385 (2009)

Capacitive pressure sensor with circular island structure

ZOU Li-ming^* and GUO Hang

Author Affiliations

[in Chinese]

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DOI: Cite this Article

ZOU Li-ming, GUO Hang. Capacitive pressure sensor with circular island structure[J]. Optics and Precision Engineering, 2009, 17(6): 1385 Copy Citation Text

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References

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