• Journal of Synthetic Crystals
  • Vol. 49, Issue 5, 794 (2020)
ZHOU Hao1,2, XU Yu3, CAO Bing1,2, XU Ke3, and WANG Chinhua1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • show less
    DOI: Cite this Article
    ZHOU Hao, XU Yu, CAO Bing, XU Ke, WANG Chinhua. Orientation Evolution Study of Epitaxial GaN Films on Graphene[J]. Journal of Synthetic Crystals, 2020, 49(5): 794 Copy Citation Text show less

    Abstract

    The evolution of crystal orientation of GaN films grown on graphene was investigated. Assisted with AlN nucleation layer, GaN was gradually merged with grains which had the same orientation of graphene from smaller polycrystalline grains. Finally, a GaN film with a thickness of about 4.6 μm was formed. EBSD and XRD have confirmed that the overall orientation of GaN becomes consistent, and Raman spectrum also shows the high crystalline quality of the GaN.