[1] Y. Mori, K. Yamauchi, K. Yamamura, and Y. Sano, Rev. Sci. Instrum. 71, 4627 (2000).

[2] J. W. Carr, “Atmospheric pressure plasma processing for damage-free optics and surfaces” Engineering Research Development and Technology Lawrence Livermore National Laboratory FY-99, 3-1 (1999).

[3] J. Zhang, B. Wang, and S. Dong, Opt. Prec. Eng. (in Chinese) 15, 1749 (2007).

[4] Y. Cao, Y. Wang, S. Dong, Y. Yang, Y. Liang, and T. Sun, Proc. SPIE 6724, 672417 (2007).

[5] S. Carlsson and P.-L. Larsson, Acta Mater. 49, 2193 (2001).

[6] Y. Shen, Z. Han, J. Shao, S. Shao, and H. He, Chin. Opt. Lett. 6, 225 (2008).