• Chinese Optics Letters
  • Vol. 9, Issue 5, 052201 (2011)
Shuqing Zhang1, Qi Wang2, Dongyuan Zhu1, Runshun Li1, and Chang Liu3
Author Affiliations
  • 1Research Center for Space Optical Engineering, Harbin Institute of Technology, Harbin 150080, China
  • 2Institute of Opto-Electronics, Harbin Institute of Technology, Harbin 150080, China
  • 3Center for Composite Material, Harbin Institute of Technology, Harbin 150080, China
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    DOI: 10.3788/COL201109.052201 Cite this Article Set citation alerts
    Shuqing Zhang, Qi Wang, Dongyuan Zhu, Runshun Li, Chang Liu. Optical design for EUV lithography source collector[J]. Chinese Optics Letters, 2011, 9(5): 052201 Copy Citation Text show less

    Abstract

    Wolter I collector is the best collector for extreme ultraviolet (EUV) lithography, which has a series of nested mirrors. It has high collection efficiency and can obtain more uniform intensity distribution at the intermediate focus (IF). A new design with the calculation sequence from the outer mirror to the inner one on the premise of satisfying the requirements of the collector is introduced. Based on this concept, a computer program is established and the optical parameters of the collector using the program is calculated. The design results indicate that the collector satisfies all the requirements.
    Shuqing Zhang, Qi Wang, Dongyuan Zhu, Runshun Li, Chang Liu. Optical design for EUV lithography source collector[J]. Chinese Optics Letters, 2011, 9(5): 052201
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