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    Journals >Optics and Precision Engineering >Volume 14 >Issue 6 >Page 939 > Article
    • Optics and Precision Engineering
    • Vol. 14, Issue 6, 939 (2006)
    Experimental investigation on a laser-produced plasma source with liquid aerosol spray target
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  • [in Chinese]
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    DOI: Cite this Article
    [in Chinese]. Experimental investigation on a laser-produced plasma source with liquid aerosol spray target[J]. Optics and Precision Engineering, 2006, 14(6): 939 Copy Citation Text show less
    References

    [1] LEBERT B,BERGMANN K,JUSCHKIN L,et al.Comparison of different source concepts for EUVL[J].SPIE,2001,4343:215-225.

    [2] BALLARD W P,BERNARDEZ L J,LAFON R E,et al.High-power laser-produced-plasma EUV source[J].SPIE,2002,4688:302-309.

    [3] KOMORI H,IMAI Y,SOUMAGNE G,et al.Magnetic field ion mitigation for EUV light sources[J].SPIE,2005,5751:859-866.

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    [in Chinese]. Experimental investigation on a laser-produced plasma source with liquid aerosol spray target[J]. Optics and Precision Engineering, 2006, 14(6): 939
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