[1] KAZUSUKE M, SUNAO I, NOBUHIRO S, et al..Design, fabrication and operation of MEMS gimbal gyroscope [J].Sensors and Actuators A,2005(121):6-15.
[2] SAID E A, KIVANC A, TAYFUNA A. A high-performance silicon-on insulator MEMS gyroscope operating at atmospheric pressure [J].Sensors and Actuators A,2007(135):34-42.
[3] SUNGSU P, ROBERTO H, CHIN-WOO T. Dynamics and control of a MEMS angle Measuring Gyroscope [J].Sensors and Actuators A. 2008(144):56-63.
[4] FARROKH A, KHALIL N. A HARPSS polysilicon vibrating ring gyroscope [J]. Journal of Microelectromechanical System,2001,10(2):169-179.
[5] CHANG S,CHIA M,CASTILLO-BORELLEY P, et al..An electroformed CMOS integrated angular rate sensor[J].Sensors and Actuators A,1998(66):138-143.
[6] FARROKH A, KHALIL N. Design and fabrication of a high-performance polysilicon vibrating ring gyroscope [C]. Eleventh IEEE/ASME International Workshop on Micro Electro Mechanical Systems,1998:25-29.
[7] MICHAEL W P. A micromachined vibrating ring gyroscope [D]. USA:University of Michigan,1995.
[8] FARROKH A. A high aspect-ratio high performance polysilicon vibrating ring gyroscope [D].USA:University of Michigan,2000.
[9] CHEN L, CHEN D Y, WANG J B, et al.. High performance electromagnetic micro-machined ring vibration gyroscope [J]. Opt. Precision Eng., 2009,17(8):1916-1921.(in Chinese)
[10] CHEN L, CHEN D Y, WANG J B, et al.. Micro-machined vibrating ring gyroscope [J].Opt. Precision Eng., 2009,17(6):1344-1349.
[11] CHEN L, CHEN D Y, WANG J B, et al..Mathematical modeling and optimization design of an electromagnetic micro-machined vibrating ring gyroscope [J].Nanotechnology and Precision Engineering.2009,7(3):233-238.(in Chinese)