• Optics and Precision Engineering
  • Vol. 18, Issue 11, 2454 (2010)
ZHANG Ming*, CHEN De-yong, and WANG Jun-bo
Author Affiliations
  • [in Chinese]
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    DOI: Cite this Article
    ZHANG Ming, CHEN De-yong, WANG Jun-bo. Fabrication of single-crystal silicon vibrating ring gyroscope[J]. Optics and Precision Engineering, 2010, 18(11): 2454 Copy Citation Text show less
    References

    [1] KAZUSUKE M, SUNAO I, NOBUHIRO S, et al..Design, fabrication and operation of MEMS gimbal gyroscope [J].Sensors and Actuators A,2005(121):6-15.

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    [9] CHEN L, CHEN D Y, WANG J B, et al.. High performance electromagnetic micro-machined ring vibration gyroscope [J]. Opt. Precision Eng., 2009,17(8):1916-1921.(in Chinese)

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    [11] CHEN L, CHEN D Y, WANG J B, et al..Mathematical modeling and optimization design of an electromagnetic micro-machined vibrating ring gyroscope [J].Nanotechnology and Precision Engineering.2009,7(3):233-238.(in Chinese)

    ZHANG Ming, CHEN De-yong, WANG Jun-bo. Fabrication of single-crystal silicon vibrating ring gyroscope[J]. Optics and Precision Engineering, 2010, 18(11): 2454
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