Lu Yimin, Huang Guojun, Wang Sai, Mi Chaowei, Cai Xiaohong, Tian Fangtao, Cheng Yong. Effect of Oxygen Atmosphere on Infrared Properties of Non-Hydrogenated Diamond-Like Carbon Films[J]. Chinese Journal of Lasers, 2020, 47(4): 403005
- Chinese Journal of Lasers
- Vol. 47, Issue 4, 403005 (2020)
Fig. 1. Infrared transmittance spectra of DLC film samples prepared under different conditions
Fig. 2. XPS surveys of DLC films prepared under different conditions
Fig. 3. Oxygen contents in DLC films
Fig. 4. Deconvoluted C1s spectra of DLC films and their fitting. (a) P-DLC film prepared in base vacuum; (b) O-DLC film prepared in oxygen atmosphere of 2 Pa
Fig. 5. Contents of sp2 bond and sp3 bond in DLC films
Fig. 6. Configuration transforms between the atomic bonds in O-DLC film. (a) Transformation from sp2 to sp3; (b) transformation from sp3 to sp2
Fig. 7. XRD patterns of DLC films
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Table 1. Results for XPS measurement
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