• Acta Photonica Sinica
  • Vol. 52, Issue 5, 0552201 (2023)
Peizhan LI1、2, Jiaqiang ZHONG1, Wen ZHANG1、*, Zheng WANG1, Yue GEN1、2, Qijun YAO1, Wei MIAO1, Yuan REN1, Jing LI1, and Shengcai SHI1、**
Author Affiliations
  • 1Purple Mountain Observatory, Chinese Academy of Sciences, Nanjing 210023, China
  • 2University of Science and Technology of China, Hefei 230026, China
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    DOI: 10.3788/gzxb20235205.0552201 Cite this Article
    Peizhan LI, Jiaqiang ZHONG, Wen ZHANG, Zheng WANG, Yue GEN, Qijun YAO, Wei MIAO, Yuan REN, Jing LI, Shengcai SHI. High-performance Superconducting Transition-edge Single-photon Detectors(Invited)[J]. Acta Photonica Sinica, 2023, 52(5): 0552201 Copy Citation Text show less

    Abstract

    Superconducting Transition-edge Sensor (TES) is a thermal detector that measures the deposited energy by changing the superconducting film's resistance. Superconducting TES-based single-photon detectors with high detection efficiency, low dark count rate, photon-number and arriving-time resolving capability, are ideal detectors for faint and rapidly varying sources, playing a unique role in studying pulsars, neutron stars, white dwarfs and exoplanets. The critical temperature (TC) is the key parameter that determines the energy resolution (?EFWHM) of superconducting TES single-photon detectors, which can be finely tuned by baking the superconducting film or fabricated devices in the air. We studied the characteristics of titanium and titanium/gold bilayer films and the dependence of TC on baking time (tbaking) and baking temperature (Tbaking). It was found that the TC is logarithmically decreased with tbaking for a fixed Tbaking, while it is exponentially decreased with Tbaking for a fixed tbaking. By treating the phase-slip parameters as variables, we extended the two-fluid model to extract the key parameters of superconducting TESs including temperature and current sensitivity coefficients from the measured current-voltage curves at different bath temperatures. By adding an M factor to take the excess noise into account, the simulated ?EFWHM is consistent with the measured one. We then calculated the TC dependence of ?EFWHM for a 20 μm×20 μm Ti TES device and found that superconducting TESs with a TC of less than 170 mK can easily discriminate the photon numbers with a good ?EFWHM. Finally, we designed and fabricated titanium-based superconducting TES single-photon detectors, which were embedded in an optical cavity to improve the absorption efficiency. The optical cavity is composed of a dielectric mirror with 8 periods of Ta2O5/SiO2 layers and an anti-reflection coating with 2 periods of Ta2O5/SiO2 layers. The refractive index of Ta2O5, SiO2 and titanium film were measured with an ellipsometer, thus the calculated absorption efficiency of the optical cavity at 1 550 nm is nearly 100%, which is in agreement with the measured value with an IR spectrometer. The fabricated superconducting TES single-photon detector with an active area of 20 μm×20 μm is aligned to a single-mode fiber with the help of an IR microscope and a two-dimensional moving stage, which reached a coupling efficiency of nearly 100%. A 1 550 nm pulsed light source is used to measure the optical response. To measure the system detection efficiency (ηsys), we used a calibrated power meter and two precision attenuators to determine the average photon numbered incident (μin) on the superconducting TES. The detected photon number (μout) was obtained from the height histogram with a large count of pulse responses. Then ηsys is the ratio of μout to μin, ηsys=μout/μin. We realized high-performance superconducting TES single-photon detectors with a ηsys of higher than 90% and an ?EFWHM of 0.5 eV at 1 550 nm. In addition, we developed a superconducting TES single-photon detector to detect 850 nm photons. The thickness of titanium film was chosen to be 53 nm and its TC is beyond 400 mK, which makes possible to cool it with just a He-3 sorption cooler instead of a dilution refrigerator. While working at 300 mK, the superconducting TES single-photon detector with a ηsys of 13% and an ?EFWHM of 0.75 eV can still resolve 850 nm photon numbers. Such superconducting TES single photon detectors with high ηsys, good ?EFWHM and short recovery time pave the way for the detection of rapidly varying sources.
    Peizhan LI, Jiaqiang ZHONG, Wen ZHANG, Zheng WANG, Yue GEN, Qijun YAO, Wei MIAO, Yuan REN, Jing LI, Shengcai SHI. High-performance Superconducting Transition-edge Single-photon Detectors(Invited)[J]. Acta Photonica Sinica, 2023, 52(5): 0552201
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