• Chinese Optics Letters
  • Vol. 7, Issue 10, 918 (2009)
Hongwei Liu1、2, Qiang Kan1, Chunxia Wang1, Feng Yu1, Xingsheng Xu1, and Hongda Chen1
Author Affiliations
  • 1Institute of Semiconductors, Chinese Academy of Sciences, Beijng 100083, China
  • 2School of Information and Communication Engineering, Tianjin Polytechnic University, Tianjin 300160, China
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    DOI: 10.3788/COL20090710.0918 Cite this Article Set citation alerts
    Hongwei Liu, Qiang Kan, Chunxia Wang, Feng Yu, Xingsheng Xu, Hongda Chen. Light extraction of GaN LEDs with 2-D photonic crystal structure[J]. Chinese Optics Letters, 2009, 7(10): 918 Copy Citation Text show less

    Abstract

    Ultraviolet photo-lithography is employed to introduce two-dimensional (2D) photonic crystal (PC) structure on the top surface of GaN-based light emitting diode (LED). PC patterns are transferred to 460-nm-thick transparent indium tin oxide (ITO) electrode by inductively coupled plasma (ICP) etching. Light intensity of PC-LED can be enhanced by 38% comparing with the one without PC structure. Rigorous coupled wave analysis method is performed to calculate the light transmission spectrum of PC slab. Simulation results indicate that total internal reflect angle which modulated by PC structure has been increased by 7°, which means that the light extraction efficiency is enhanced outstandingly.
    Hongwei Liu, Qiang Kan, Chunxia Wang, Feng Yu, Xingsheng Xu, Hongda Chen. Light extraction of GaN LEDs with 2-D photonic crystal structure[J]. Chinese Optics Letters, 2009, 7(10): 918
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