Useful way to compensate for intrinsic birefringence caused by calcium fluoride in optical lithography systems

Zelong Zhou; Hongbo Shang; Yongxin Sui; Huaijiang Yang

doi:10.3788/COL201816.032201

Journals >Chinese Optics Letters >Volume 16 >Issue 3 >Page 032201 > Article

Chinese Optics Letters
Vol. 16, Issue 3, 032201 (2018)

Useful way to compensate for intrinsic birefringence caused by calcium fluoride in optical lithography systems

Zelong Zhou^1、2、*, Hongbo Shang¹, Yongxin Sui¹, and Huaijiang Yang¹

Author Affiliations

¹Engineering Researcher Center of Extreme Precision Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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DOI: 10.3788/COL201816.032201 Cite this Article Set citation alerts

Zelong Zhou, Hongbo Shang, Yongxin Sui, Huaijiang Yang. Useful way to compensate for intrinsic birefringence caused by calcium fluoride in optical lithography systems[J]. Chinese Optics Letters, 2018, 16(3): 032201 Copy Citation Text

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