A novel four-arm structure single crystal silicon MEMS gripper integrated with force sensors is successfully developed by using a silicon bulk machining method to realize the monolithically fabrication and the control of gripping force.Based on the technology of the piezoresistive detection,an effective technique for fabricating vertical sidewall piezoresistors in planes is used to fabricate the piezoresistor in the end of the end-effectors.The Finite Element Analysis (FEA) is used to analyze the structure of the gripper and the flexible beams of the force sensors.The comb microactuator generates a linear horizontal motion,which is converted into a rotational motion by an S-type flexible beam system to realize the gripping motion.Combined with the four-arm structure,the manipulating range is expanded.The bonding of the silicon and the glass is used to realize the electrical isolation of the gripping arms.At a voltage of 80 V,the deflection of the arm tip is 25 μm and the ranges of the operation are 30~130 μm.Testing results show that the maximum measurement range of the piezoresistive sensors is better than 1 mN and the resolution is better than 3 μN,which can be used effectively in the force feedback.