• Acta Photonica Sinica
  • Vol. 54, Issue 2, 0231002 (2025)
Weijian LIU1,*, Yang HUANG1, Shengjie ZHANG1, Junru SONG1..., Chao ZHANG1, Yi JI1 and Qun YUAN2|Show fewer author(s)
Author Affiliations
  • 1Beijing Institute of Space Mechanics and Electricity, Beijing 100094, China
  • 2School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
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    DOI: 10.3788/gzxb20255402.0231002 Cite this Article
    Weijian LIU, Yang HUANG, Shengjie ZHANG, Junru SONG, Chao ZHANG, Yi JI, Qun YUAN. High Precision Testing of Optical Homogeneity of Large Aperture Infrared Materials Based on Beam Expansion and Auxiliary Measurement[J]. Acta Photonica Sinica, 2025, 54(2): 0231002 Copy Citation Text show less
    Principle of traditional four-step interferometry
    Fig. 1. Principle of traditional four-step interferometry
    Optical homogeneity measurement system of large aperture infrared materials based on beam expansion
    Fig. 2. Optical homogeneity measurement system of large aperture infrared materials based on beam expansion
    Four-step interferometry based on beam expansion and auxiliary measurement
    Fig. 3. Four-step interferometry based on beam expansion and auxiliary measurement
    The optical homogeneity testing experiment of the large aperture infrared material
    Fig. 4. The optical homogeneity testing experiment of the large aperture infrared material
    The measurement results of the homogeneity of small aperture sample
    Fig. 5. The measurement results of the homogeneity of small aperture sample
    The measurement results of the four-step interferometry based on beam expansion and auxiliary measurement
    Fig. 6. The measurement results of the four-step interferometry based on beam expansion and auxiliary measurement
    The pixel error induced by wedge of the sample
    Fig. 7. The pixel error induced by wedge of the sample
    NumberMaterialSize/mmHomogeneity results d·ΔnxyPV/nmRMS/nmHomogeneity
    1#SIФ360×476 907.767981.4531.47×10-4
    2#GEФ350×507 855.1001 409.1491.57×10-4
    3#SIФ380×827 841.6511 174.3809.56×10-5
    4#GEФ380×706 723.721822.9579.61×10-5
    Table 1. Homogeneity measurement results of infrared materials
    Measurement repeatabilityΔW1ΔW2ΔW3ΔW4
    PV value(λ=3.39 μm)0.03λ0.05λ0.02λ0.01λ
    Table 2. The measurement repeatability
    NumberUncertainty component

    Measurement

    uncertainty

    (Ge d=50 mm)

    Measurement

    uncertainty

    (Ge d=70 mm)

    Measurement

    uncertainty

    (Si d=47 mm)

    Measurement

    uncertainty

    (Si d=82 mm)

    1Measurement repeatability1.7×10-51.2×10-51.6×10-58.9×10-6
    2Pixel deviation4.0×10-74.0×10-74.0×10-74.0×10-7
    3Thickness error2.0×10-81.4×10-82.1×10-81.2×10-8
    4Refractive index error2.5×10-82.5×10-82.9×10-82.9×10-8
    Combined uncertainty1.7×10-51.2×10-51.6×10-58.9×10-6
    Expanded uncertainty(k=2)3.4×10-52.4×10-53.2×10-51.8×10-5
    Table 3. Measurement uncertainty analysis
    Weijian LIU, Yang HUANG, Shengjie ZHANG, Junru SONG, Chao ZHANG, Yi JI, Qun YUAN. High Precision Testing of Optical Homogeneity of Large Aperture Infrared Materials Based on Beam Expansion and Auxiliary Measurement[J]. Acta Photonica Sinica, 2025, 54(2): 0231002
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