Investigation of the trajectory uniformity in water dissolution ultraprecision continuous polishing of large-sized KDP crystal

Zhipeng Cheng; Hang Gao; Ziyuan Liu; Dongming Guo

doi:10.1088/2631-7990/abaabe

[1] Moses E I et al 2016 Overview: development of the national ignition facility and the transition to a user facility for the ignition campaign and high energy density scientific research Fusion Sci. Technol. 69 1–24

[2] Campbell J H et al 2004 NIF optical materials and fabrication technologies: an overview Proc. SPIE 5341 84–101

[3] Baisden P A et al 2016 Large optics for the national ignition facility Fusion Sci. Technol. 69 295–351

[4] Dmitriev V G, Gurzadyan G G, Nikogosyan D N and Braun C 1992 Handbook of nonlinear optical crystals Appl. Opt. 31 6348–440

[5] Tie G P, Dai Y F, Guan C L, Chen S S and Song B 2013 Research on subsurface defects of potassium dihydrogen phosphate crystals fabricated by single point diamond turning technique Opt. Eng. 52 033401

[6] Xu Q, Wang J, Li W, Zeng X and Jing S Y 1999 Defects of KDP crystal fabricated by single-point diamond turning Proc. SPIE 3862 236–9

[7] Qu M N, Xie G Z, Jin T, Cai R and Lu A G 2019 Realization of high efficiency and low damage machining of anisotropic KDP crystal by grinding Precis. Eng. 55 464–73

[8] Wu D J, Cao X S, Gao H and Kang R K 2008 Surface defection and damage analysis of KDP crystal grinding China Mech. Eng. 19 709–12

[9] Zhang Y F, Fang F Z, Huang W, Wang C and Fan W 2018 Polishing technique for potassium dihydrogen phosphate crystal based on magnetorheological finishing Procedia CIRP 71 21–6

[10] Yuan Z, et al 2013 Cleaning of iron powders embedded into the surface of KDP crystal by ion beam figuring J. Synth. Cryst. 42 582

[11] Wang X, Gao H, Chen Y C and Guo D M 2016 A water dissolution method for removing micro-waviness caused by SPDT process on KDP crystals Int. J. Adv. Manuf. Technol. 85 1347–60

[12] Gao H, Wang X, Teng X J and Guo D M 2015 Micro water dissolution machining principle and its application in ultra-precision processing of KDP optical crystal Sci. China Technol. Sci. 58 1877–83

[13] Gao H, Song C P and Guo D M 2015 Principle of ultra precision polishing with micro water mist for KDP/DKDP crystals Int. J. Nanomanuf. 11 150–60

[14] Zhang H P, Guo D M, Wang X and Gao H 2012 Simulation of large scale KDP crystal polishing by computer controlled micro-nano deliquescence Adv. Mater. Res. 497 165–9

[15] Wang B L, Li Y Z and Gao H 2010 Water-in-oil dispersion for KH2PO4 (KDP) crystal CMP J. Disper. Sci. Technol. 31 1611–7

[16] Guo S L, Zhang F H, Zhang Y and Luan D R 2009 Research on deliquescent polishing fluid for KDP crystals Mater. Sci. Forum 626-7 53–8

[17] Zhang F H, Guo S L, Zhang Y and Luan D R 2009 Research on the material removal mechanism in deliquescent polishing of KDP crystals Key Eng. Mater. 416 487–91

[18] Wang B L, Gao H, Teng X J and Kang R K 2010 Effect of polishing parameter on material removal and surface quality of KDP crystal J. Synth. Cryst. 39 43

[19] Gao H, Wang B L, Guo D M and Li Y Z 2010 Experimental study on abrasive-free polishing for KDP crystal J. Electrochem. Soc. 157 H853–6

[20] Dong H, Wang L L, Gao W, Li X Y, Wang C, Ji F, Pan J and Wang B 2017 KDP aqueous solution-in-oil microemulsion for ultra-precision chemical-mechanical polishing of KDP crystal Materials 10 271

[21] Jiao X, Zhu J Q, Fan Q T and Li Y S 2015 Application of continuous polishing technology to manufacturing of a lens array Chin. J. Lasers 42 265–70

[22] Li J, Huang J Y, Hua C X, Wang J J, Zhu Y W and Zuo D 2019 Design of surface grooves on a polishing pad based on slurry uniform flow Int. J. Adv. Manuf. Technol. 103 4795–803

[23] Cheng K and Huo D H 2013 Micro-Cutting: Fundamentals and Applications (Chichester: Wiley) pp 1–348

[24] Liu Z T, Jin Z J, Wu D and Guo J 2019 Investigation on material removal uniformity in electrochemical mechanical polishing by polishing pad with holes ECS J. Solid State Sci. Technol. 8 P3047–52