The technical problems concerning the determination of the laser beam parameters by using area array charge couple device (CCD) detector were studied. The beam parameters of Hermite-Gaussian modes generated from laser diode (LD) pumped CW Nd∶YAG laser with 1064 nm and a lamp pumped Q-switched Nd∶YAG laser with 10 ns pulse width were experimentally measured. Comparing the measured beam quality factor M2 with theoretical one, the measuring deviation of M2 was less than 5%. The measuring error of the divergence was elso less than 5%. The influences of various factors on the measured beam parameters were discussed.