Rongwei LIN, Zhenying CHENG, Yaxiong HE, Jie LI, Ruijun LI. On-line six-degree-of-freedom errors measurement and compensation for XY stages[J]. Optics and Precision Engineering, 2023, 31(12): 1761
- Optics and Precision Engineering
- Vol. 31, Issue 12, 1761 (2023)
Fig. 1. Volumetric positional errors of functional point caused by 6-DOF errors
Fig. 2. Positioning errors caused by non-compliance with Abbe principle
Fig. 3. Straightness measuring errors caused by non-compliance with Bryan principle
Fig. 4. Diagram of 6-DOF errors measurement methods
Fig. 5. Diagram of relationship among measuring point， functional point and working volume of a XY stage
Fig. 6. Schematic of 6-DOF errors measurement system
Fig. 7. Schematic of measuring principle of PMI-X、PMI-Y and PMI-Z
Fig. 8. Schematic of the measuring principle of angular errors
Fig. 9. Photo of 6-DOF errors measurement system
Fig. 10. Test results of the resolution of PMI-X，PMI-Y and PMI-Z
Fig. 11. Schematic of calibration of PMIs
Fig. 12. Schematic of calibration of Acs
Fig. 13. Test results of the resolution of AC1 and AC2
Fig. 14. The results of the stability test of the system
Fig. 15. Schematic of experimental setup of positional accuracy test for the stage
Fig. 16. Volumetric positional errors in RFP
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Table 1. Calibration results of PMI-X，PMI-Y and PMI-Z
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Table 2. Calibration results of AC1 and AC2
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Table 3. Standard uncertainty of the measuring units
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